Country - France
Summary - Supply Of 300 Mm Metal Deposition Equipment For Beol Applications
Deadline - login to view
IT reference number - 90454003
Product classification - Microelectronic machinery and apparatus
Address - France
Contact details - 565656565
Tender notice no. - 76454545
IT Ref Id - 90454003
Document Type - Tender Notices
Description - Description: CEA-Leti wishes to acquire a 300 mm metal deposition equipment for BEOL applications.It is intended to perform pre-clean steps (CuOx removal), TaN barrier deposition, Co liner and Cu seed for advanced copper interconnections, as required for 7 nm FDSOI technology nodes and beyond. The equipment must also have the capacity to perform selective Co capping deposition to limit copper diffusion.This contract includes:• An optional tranche n°1 relating to the supply of a PVD chamber for ALCu deposition (Process 6).This contract also includes the following mandatory options:• Option No. 1: Supply of an ALD chamber for TaN deposition (Process 3) equipped with a plasma to remove the
It Ref Id - 90454003
Deadline - Aug 23, 2024
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